Illumination system and exposure apparatus with demountable tran

Details Illumination system and exposure apparatus with demountable tran Illumination system and exposure apparatus with demountable tran

1996-05-21

1997-12-23

Pendegrass, Joan H.

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

355 67, H01L 2130, G03F 720

Patent

active

057011699

ABSTRACT:
An illumination system includes an optical system for receiving light from a light source, a barrel for accommodating the light source and the optical system therein, the barrel having an inside gas containing a material which may cause blur of an optical element of the optical system, and a transparent protecting member demountably mountable on the barrel, for protecting the optical system against the material.

REFERENCES:
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patent: 4630922 (1986-12-01), Imai et al.
patent: 4634270 (1987-01-01), Yokoo et al.
patent: 4657805 (1987-04-01), Fukumitsu et al.
patent: 4763169 (1988-08-01), Jackson
patent: 4931830 (1990-06-01), Suwa et al.
patent: 5160962 (1992-11-01), Miura et al.

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