Illumination system and exposure apparatus using the same

Details Illumination system and exposure apparatus using the same Illumination system and exposure apparatus using the same

1996-09-03

2000-04-25

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, G03B 2754, G03B 2742

Patent

active

060550392

ABSTRACT:
An illumination system includes a fly's eye lens including lens elements each having an approximately oblong shape in section perpendicular to an optical axis of the illumination system, and an optical system for separating light from a light source into plural lights and for directing the plural lights toward the fly's eye lens along different directions. The optical system is arranged so that paths of the plural lights are juxtaposed along a lengthwise direction of the oblong shapes. A device manufacturing method includes transferring a device pattern of a mask onto a workpiece using such an illumination system.

REFERENCES:
patent: 4497013 (1985-01-01), Ohta
patent: 4682885 (1987-07-01), Torigoe
patent: 5091744 (1992-02-01), Omata
patent: 5153773 (1992-10-01), Muraki et al.
patent: 5218660 (1993-06-01), Omata
patent: 5263250 (1993-11-01), Nishiwaki et al.
patent: 5305054 (1994-04-01), Sizuki et al.
patent: 5379090 (1995-01-01), Shiraishi

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