Illumination system and exposure apparatus

Details Illumination system and exposure apparatus Illumination system and exposure apparatus

2008-01-29

2008-01-29

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S067000

Reexamination Certificate

active

07324187

ABSTRACT:
Disclosed is an illumination optical system and an exposure apparatus having the same, and specifically, as an aspect of the invention, an illumination optical system for illuminating a surface to be illuminated, that includes an aperture stop for defining an effective light source distribution upon a predetermined plane which is substantially in a Fourier transform relation with the surface to be illuminated, and a detector disposed adjacent an opening of the aperture stop.

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English translation of the Japanese Utility-Model Laid-Open Appl. No. 58-45533 (4 pages).

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