Illumination system and exposure apparatus

Details Illumination system and exposure apparatus Illumination system and exposure apparatus

1997-09-11

1999-10-05

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 362268, G03B 2754, G03B 2742

Patent

active

059633050

ABSTRACT:
An illumination system includes an optical integrator having an element lenses arrayed in a direction perpendicular to an optical axis, and an optical system for directing lights from the element lenses of the integrator t a surface to be illuminated, wherein the element lenses include particular element lenses having different optical characteristics which are determined so that upon the surface to be illuminated those lights from the particular element lenses are partly superposed one upon another to provide a non-uniform illuminance ditribution on the surface with respect to a predetermined direction.

REFERENCES:
patent: 4988188 (1991-01-01), Ohta
patent: 5098184 (1992-03-01), Brandt et al.
patent: 5418583 (1995-05-01), Masumoto
patent: 5684567 (1997-11-01), Shiozawa
patent: 5798824 (1998-08-01), Kudo

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