Illumination system

Details Illumination system Illumination system

1989-05-24

1991-04-09

Arnold, Bruce Y.

Illumination

Supported by vehicle structure

Condition responsive

350409, 362268, G02B 308, F21V 1300

Patent

active

050059599

ABSTRACT:
An illumination system applicable to contact or proximity exposure apparatuses provides excellently collimated light without any irradiance reduction in the peripheral area of an object to be illuminated and includes a light source, an ellipsoidal mirror positioned with respect to the light source, an optical system designed so that the entrance height of the light received in the entrance pupil thereof is substantially proportioned to the tangent of the exit angle in the exit pupil thereof, and a single Fresnel lens designed so that light passing therethrough is abated in the spherical aberration. Light exiting from the optical system is received on the front surface of the Fresnel lens, where the irradiance distribution is uniform through the surface, and the Fresnel lens transmits light received with abated spherical aberration to a mask film bearing a desired circuit pattern.

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Zhdanov and Pankova, "Plastic Fresnel Lenses for Projector Condenser Systems", Optical Technology, vol. 38, No. 2, 2/71, pp. 106-109.
Halliday and Resnick, Fundamentals of Physics, 1981, pp. 710-713.

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