Illumination optical system in exposure apparatus

Details Illumination optical system in exposure apparatus Illumination optical system in exposure apparatus

2006-05-23

2006-05-23

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S071000

Reexamination Certificate

active

07050154

ABSTRACT:
An illumination system for illuminating a surface by use of light from a light source, which includes an emission angle conserving optical unit effective to emit the light from the light source at a constant divergent angle, and a diffractive optical element for producing a desired light intensity distribution on a predetermined plane. The diffractive optical element is disposed at or adjacent to a position where light from the emission angle conserving optical unit is collected.

REFERENCES:
patent: 3802762 (1974-04-01), Kiemle
patent: 4255019 (1981-03-01), Knop
patent: 5383000 (1995-01-01), Michaloski et al.
patent: 5638211 (1997-06-01), Shiraishi
patent: 5663785 (1997-09-01), Kirk et al.
patent: 5684567 (1997-11-01), Shiozawa
patent: 6057065 (2000-05-01), Rolson
patent: 6095667 (2000-08-01), Kamihara et al.
patent: 6211944 (2001-04-01), Shiraishi
patent: 6233071 (2001-05-01), Orr et al.
patent: 6259512 (2001-07-01), Mizouchi
patent: 6285855 (2001-09-01), Tsuji
patent: 6392742 (2002-05-01), Tsuji
patent: 0 486 316 (1991-11-01), None
patent: 0 867 772 (1998-09-01), None
patent: 4-225359 (1992-08-01), None
patent: 7-263313 (1995-10-01), None
patent: 10-70070 (1998-03-01), None
patent: 10-270312 (1998-10-01), None
patent: 11-54426 (1999-02-01), None
patent: 11-162837 (1999-06-01), None
patent: 11-176721 (1999-07-01), None
patent: 2001-135560 (2001-05-01), None
patent: 2001-284237 (2001-10-01), None
Japanese Office Action dated Sep. 7, 2004, issued in corresponding Japanese patent application No. 2000-93688, with partial English translation.

Affiliated with

Also associated with

Rating

Illumination optical system in exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illumination optical system in exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination optical system in exposure apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3563586