Illumination optical system for use in projection exposure...

Details Illumination optical system for use in projection exposure... Illumination optical system for use in projection exposure...

2005-06-07

2005-06-07

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S071000, C355S077000

Reexamination Certificate

active

06903801

ABSTRACT:
Disclosed is an illumination optical system for illuminating a surface, to be illuminated, with use of light from a light source, which includes a diffractive optical element for forming a desired light intensity distribution upon a predetermined plane, and an angular distribution transforming unit for transforming an angular distribution of light incident or to be incident on the diffractive optical element into a desired distribution.

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