Illumination optical system, exposure device using the...

Details Illumination optical system, exposure device using the... Illumination optical system, exposure device using the...

2007-10-30

2007-10-30

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Lens

With light limiting or controlling means

C359S238000

Reexamination Certificate

active

11187998

ABSTRACT:
In an illumination optical system constituted to uniformize the intensity distribution of illumination light by use of an optical integrator, the overall length thereof is shortened. The illumination optical system includes: a light source including a laser irradiating illumination light on an illuminated body such as a two-dimensional SLM and an optical integrator; the optical integrator being placed between this light source and the illuminated body and uniformizes the intensity distribution of the illumination light by passing the light through minute cells. In this system, the size of the minute cell of the optical integrator (S1=S2) is 1.5 mm or less.

REFERENCES:
patent: 4095891 (1978-06-01), Lovering
patent: 5329354 (1994-07-01), Yamamoto et al.
patent: 6224216 (2001-05-01), Parker et al.
patent: 6312134 (2001-11-01), Jain et al.
patent: 6718088 (2004-04-01), Okazaki et al.
patent: 6784961 (2004-08-01), Suzuki et al.
patent: 2004/0057034 (2004-03-01), Zinn et al.
patent: 2004/0114112 (2004-06-01), Kim et al.
patent: 09-68667 (1997-03-01), None

Affiliated with

Also associated with

Rating

Illumination optical system, exposure device using the... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illumination optical system, exposure device using the..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination optical system, exposure device using the... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3862527