Illumination optical system, exposure device using the...

Details Illumination optical system, exposure device using the... Illumination optical system, exposure device using the...

2005-10-25

2005-10-25

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Lens

With light limiting or controlling means

C359S242000, C359S238000, C359S290000, C355S067000

Reexamination Certificate

active

06958867

ABSTRACT:
In an illumination optical system constituted to uniformize the intensity distribution of illumination light by use of an optical integrator, the overall length thereof is shortened. The illumination optical system includes: a light source including a laser irradiating illumination light on an illuminated body such as a two-dimensional SLM and an optical integrator; the optical integrator being placed between this light source and the illuminated body and uniformizes the intensity distribution of the illumination light by passing the light through minute cells. In this system, the size of the minute cell of the optical integrator (S1=S2) is 1.5 mm or less.

REFERENCES:
patent: 6224216 (2001-05-01), Parker et al.
patent: 6784961 (2004-08-01), Suzuki et al.
patent: 2004/0057034 (2004-03-01), Zinn et al.
patent: 9-68667 (1997-03-01), None

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