Illumination optical system, exposure device and device manufact

Details Illumination optical system, exposure device and device manufact Illumination optical system, exposure device and device manufact

1997-06-30

1999-08-31

Ben, Loha

Optical: systems and elements

Single channel simultaneously to or from plural channels

359619, 359628, 362259, 362268, 355 67, G02B 2710

Patent

active

059461381

ABSTRACT:
An illumination optical system includes a light source which produces a light beam, the light beam having an anisotropic coherence, with a high coherence direction and a low coherence direction, and an optical integrator, which includes a plurality of lens elements upon which the light beam is incident. The plurality of lens elements each include an opening having a long direction and a short direction. The long direction of each of the plurality of lens elements is aligned with the high coherence direction of the light beam, and the short direction of each of the plurality of lens elements is aligned with the low coherence direction of the light beam.

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