Illumination optical system, exposure apparatus having the...

Details Illumination optical system, exposure apparatus having the... Illumination optical system, exposure apparatus having the...

2005-05-17

2005-05-17

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S068000, C355S069000, C355S071000, C355S053000

Reexamination Certificate

active

06894764

ABSTRACT:
An illumination optical system for illuminating a reticle using light from a light source includes an illumination-light generating mechanism for generating a light amount distribution on a plane that has a substantially Fourier conversion relationship with the reticle while making variable a ratio of a light amount between a first area and a second area different from the first area, the first and second areas being on the plane.

REFERENCES:
patent: 5345292 (1994-09-01), Shiozawa et al.
patent: 5357311 (1994-10-01), Shiraishi
patent: 5357312 (1994-10-01), Tounai
patent: 5452054 (1995-09-01), Dewa et al.
patent: 5675401 (1997-10-01), Wangler et al.
patent: 6211944 (2001-04-01), Shiraishi
patent: 6233041 (2001-05-01), Shiraishi
patent: 6252647 (2001-06-01), Shiraishi
patent: 6259512 (2001-07-01), Mizouchi
patent: 20020177048 (2002-11-01), Saitoh et al.

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