Illumination optical system, exposure apparatus, and device...

Details Illumination optical system, exposure apparatus, and device... Illumination optical system, exposure apparatus, and device...

2007-09-04

2007-09-04

Lee, Diane (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S067000

Reexamination Certificate

active

11158017

ABSTRACT:
An illumination optical system for illuminating a target surface using light from a light source includes a modified illumination generator for generating a modified illumination with a predetermined polarization state for the target surface, wherein the modified illumination generator includes a λ/4 phase plate unit that includes a λ/4 phase plate for converting a circularly polarized light into a linearly polarized light in a predetermined direction, and a diffractive optical element unit that is arranged in a substantially conjugate relationship with the target surface, and includes a diffractive optical element used for the λ/4 phase plate to generate a predetermined illumination intensity distribution when the diffractive optical element unit receives the linearly polarized light.

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Office Action (Notice of Remarks Filing) issued to the Korean counterpart and mailed Aug. 9, 2006.

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