Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-05-31
2008-09-09
Lee, Diane I. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
Reexamination Certificate
active
07423731
ABSTRACT:
An illumination optical system for, when installed in an exposure system, realizing a suitable illumination condition by varying the polarized state of the illumination light according to the pattern characteristics of the mask while suppressing the loss of the intensity of the light. The illumination optical system has a light source unit for supplying a linearly polarized light for illuminating surfaces to be illuminated therewith, and a polarized state changing device for changing the polarized state of the illuminating light from a predetermined polarized state to a nonpolarized state and vice versa. The polarized state changing device is arranged in the optical path between the light source unit and the surfaces to be illuminated. The polarized state changing device can be removed from the illumination optical path and has a depolarizer for selectively depolarizing the incident linearly polarized light.
REFERENCES:
patent: 5072126 (1991-12-01), Progler
patent: 5559583 (1996-09-01), Tanabe
patent: 5677755 (1997-10-01), Oshida et al.
patent: 5684567 (1997-11-01), Shiozawa
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6238063 (2001-05-01), Tanitsu et al.
patent: 6400441 (2002-06-01), Nishi et al.
patent: 6483573 (2002-11-01), Schuster
patent: 6762824 (2004-07-01), Mori
patent: 2002/0015282 (2002-02-01), Bang
patent: 2002/0163741 (2002-11-01), Shibazaki
patent: 2003/0025890 (2003-02-01), Nishinaga
patent: 2003/0067591 (2003-04-01), Komatsuda
patent: 2003/0086071 (2003-05-01), McGuire, Jr.
patent: 2004/0036977 (2004-02-01), Tanaka et al.
patent: 0823662 (1998-02-01), None
patent: 1139521 (2002-10-01), None
patent: A-6-124873 (1994-05-01), None
patent: A 06-140306 (1994-05-01), None
patent: A 06-204121 (1994-07-01), None
patent: A-10-303114 (1998-11-01), None
patent: A-2002-184676 (2002-06-01), None
patent: A 2003-188087 (2003-07-01), None
patent: WO99/49504 (1999-09-01), None
Komine Norio
Kudo Takehito
Matsuyama Tomoyuki
Muramatsu Kenichi
Nishinaga Hisashi
Lee Diane I.
Liu Chia-how Michael
Nikon Corporation
Oliff & Berridg,e PLC
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