Illumination optical system and method, and exposure apparatus

Details Illumination optical system and method, and exposure apparatus Illumination optical system and method, and exposure apparatus

2006-02-14

2006-02-14

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S077000, C430S311000

Reexamination Certificate

active

06999157

ABSTRACT:
An illumination optical system for illuminating a reticle using light from a light source includes an illumination-light generating mechanism for generating a light amount distribution on a plane that has a substantially Fourier conversion relationship with the reticle while making variable a ratio of a light amount or area between a first area and a second area different from the first area, the first and second areas being on the plane, wherein light from the first area illuminates the reticle to resolve a desired pattern on the reticle, and light from the second area illuminates the reticle to restrain an auxiliary pattern on the reticle from resolving.

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