Illumination optical system and laser processor having the same

Details Illumination optical system and laser processor having the same Illumination optical system and laser processor having the same

2005-05-17

2005-05-17

Mack, Ricky (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

C359S798000, C359S799000, C359S800000

Reexamination Certificate

active

06894839

ABSTRACT:
An illumination optical system has superior image formation capabilities, and can radiate a linear beam with excellent illumination uniformity and a narrow line width having a large aspect ratio; the illumination optical system comprises an afocal beam expander system which expands an beam illuminated from a laser light source; a linear beam-forming lens system having at least refractive power in a second direction which is substantially at a right angle to at least a first direction, the linear beam-forming lens system converting the beam, illuminated from said beam expander system, to a linear beam having its long side in said first direction; a lens array section having a plurality of element lenses, arranged along said first direction; and a condenser optical system which illuminates a processed face by reconnecting images of said linear beam from each of said element lenses thereon.

REFERENCES:
patent: 4974919 (1990-12-01), Muraki et al.
patent: 5453814 (1995-09-01), Aiyer
patent: 5724122 (1998-03-01), Oskotsky
patent: 5852508 (1998-12-01), Kubota et al.
patent: 6183094 (2001-02-01), Ohta
patent: 6377336 (2002-04-01), Shiraishi et al.
patent: 6393042 (2002-05-01), Tanaka
patent: 6467911 (2002-10-01), Ueyama et al.
patent: 2249724 (1997-05-01), None
patent: 61-75523 (1986-04-01), None
patent: 10-153746 (1998-06-01), None
patent: 10-314970 (1998-12-01), None
patent: 11-16851 (1999-01-01), None
patent: H10-244392 (1999-09-01), None

Affiliated with

Also associated with

Rating

Illumination optical system and laser processor having the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illumination optical system and laser processor having the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination optical system and laser processor having the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3410167