Illumination optical system and exposure apparatus using the...

Details Illumination optical system and exposure apparatus using the... Illumination optical system and exposure apparatus using the...

2007-03-27

2007-03-27

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S067000

Reexamination Certificate

active

10538230

ABSTRACT:
An illumination optical system for illuminating an illuminated surface using light from a light source includes a first diffraction optical element upon which the light from the light source is incident, and a second diffraction optical element upon which the light from the light source is incident, wherein the light from the first diffraction optical element forms a first part of an illumination distribution on a predetermined surface that substantially has a Fourier transform relationship with the illuminated surface, and the light from the second diffraction optical element forms a second part of the illumination distribution.

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International Search Report dated Dec. 8, 2004.

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