Illumination optical system and exposure apparatus including the

Details Illumination optical system and exposure apparatus including the Illumination optical system and exposure apparatus including the

1993-07-27

1995-02-21

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 55, 355 71, G03B 2754

Patent

active

053920945

ABSTRACT:
Disclosed is an illumination optical system comprising: a parallel beam supplying means for supplying parallel beams; a first optical integrator for forming substantially first surface illuminants by the beams coming from the parallel beam supplying means; a first converging optical system for converging the beams from the plurality of secondary illuminants; a second optical integrator for forming substantially second surface illuminants by the plurality of beams converged by the first converging optical system; and a second converging optical system for converging the beams from the second surface illuminants formed through the second optical integrator and illuminating an irradiated surface with the converged beams in superposition. At least one of the first optical integrator and the first converging optical system includes a plurality of lens systems interchangeable each other and having focal lengths different from each other. One of the plurality of lens systems is inserted in a light path. A size of the second surface illuminants is thereby made variable while maintaining an irradiated area to a fixed size.

REFERENCES:
patent: 3733128 (1973-05-01), Naumann et al.
patent: 4497015 (1985-01-01), Konno et al.
patent: 4939630 (1990-07-01), Kikuchi et al.
patent: 5237367 (1993-08-01), Kudo
patent: 5245384 (1993-09-01), Mori

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