Illumination optical system and exposure apparatus having the sa

Details Illumination optical system and exposure apparatus having the sa Illumination optical system and exposure apparatus having the sa

1997-07-22

1999-07-20

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 77, G03B 2754, G03B 2732

Patent

active

059262575

ABSTRACT:
An illumination optical system includes a first diffraction optical element, a second diffraction optical element and a condenser lens. The first diffraction optical element has a plurality of micro diffraction optical elements, which have a first optical power in a first direction and an optical power different from the first optical power in a second direction, perpendicular to the first direction. The second diffraction optical element has a plurality of micro diffraction optical elements, which have a second optical power in the second direction and an optical power different from the second optical power in the first direction. The first optical power is different from the second optical power. Light supplied from a light source forms a plurality of secondary light sources by passing through the first and second diffraction optical elements. Light from the secondary light sources passing through the condenser lens generates Kohler illumination on a surface to be irradiated.

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