Illumination optical system and exposure apparatus

Details Illumination optical system and exposure apparatus Illumination optical system and exposure apparatus

2006-06-20

2006-06-20

Perkey, W. B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S071000

Reexamination Certificate

active

07064806

ABSTRACT:
An exposure apparatus includes an illumination optical system for illuminating a reflection mask that forms a pattern, by using light from a light source, wherein the illumination optical system includes a field stop that defines an illuminated area on the reflection mask, and has an opening, and an imaging system for introducing the light from the opening in the field stop into the reflection mask, the imaging system being a coaxial optical system, wherein a principal ray of the imaging system at a side of the reflection mask forming an inclination angle to a common axis of the coaxial optical system, the inclination angle being approximately equal to an angle between a principal ray of the projection optical system at the side of the reflection mask and a normal to a surface of the reflection mask.

REFERENCES:
patent: 5677939 (1997-10-01), Oshino
patent: 5995582 (1999-11-01), Terashima et al.
patent: 6452661 (2002-09-01), Komatsuda
patent: 6504896 (2003-01-01), Miyake et al.
patent: 6860610 (2005-03-01), Terasawa
patent: 2002/0054660 (2002-05-01), Komatsuda et al.
patent: 2003/0031017 (2003-02-01), Tsuji
patent: 2003/0142322 (2003-07-01), Sato
patent: 7-235472 (1995-09-01), None
patent: 10-70058 (1998-03-01), None
patent: 11-312638 (1999-11-01), None
patent: 2003-45774 (2003-02-01), None
patent: 2003-45784 (2003-02-01), None
patent: 2003-506747 (2003-02-01), None
patent: 01/09681 (2001-02-01), None
patent: 01/09681 (2001-02-01), None

Affiliated with

Also associated with

Rating

Illumination optical system and exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illumination optical system and exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination optical system and exposure apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3628063