Illumination optical system and exposure apparatus

Details Illumination optical system and exposure apparatus Illumination optical system and exposure apparatus

2006-09-19

2006-09-19

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S071000, C250S548000, C378S034000, C378S035000

Reexamination Certificate

active

07110084

ABSTRACT:
Attempting to provide an illumination optical system and an exposure apparatus using the same, which provide a more uniform angular distribution of light for illuminating a mask than the prior art, an illumination optical system for illuminating an object surface includes an optical unit that converts light from a light source section into approximately parallel light, and includes first and second mirrors, wherein the first mirror has an opening, through which light reflected by the second mirror passes.

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Taiwanese Office Action issued on Mar. 14, 2005.
Korean Patent Office Action issued on of corresponding Korean Patent Application No. 10-2004-0074099 mailed Mar. 22, 2006 (3 pages) and English translation (2 pages).

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