Illumination optical system

Details Illumination optical system Illumination optical system

1994-12-21

1998-10-27

Epps, Georgia Y.

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

359618, 355 55, 355 67, G02B 2710

Patent

active

058284966

ABSTRACT:
An illumination optical system includes a beam dividing device for dividing a radiation beam into plural illumination beams, and an optical arrangement for superposing the illumination beams one upon another on a surface to be illuminated, the optical arrangement having different focal distances in substantially orthogonal first and second directions, and the optical arrangement being adapted to focus each of the illumination beams on the surface in the first direction while defocusing the same in the second direction, whereby a linear illumination region is defined on the surface.

REFERENCES:
patent: 4093964 (1978-06-01), Aughton
patent: 4682885 (1987-07-01), Torigoe
patent: 4733944 (1988-03-01), Fahlen et al.
patent: 4851882 (1989-07-01), Takahashi et al.
patent: 5091744 (1992-02-01), Omata
patent: 5263250 (1993-11-01), Nishiwaki et al.

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