Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-12-11
2007-12-11
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
10521590
ABSTRACT:
An illumination optical device, wherein a micro channel is not generated practically in a diffractive optical element arranged in an optical path of pulse laser light having high energy density. An illumination optical device having a light source (1) for supplying pulse laser light, wherein an irradiated plane (M) is illuminated with light from this light source. The illumination optical device comprises a diffractive optical element (4) arranged in an optical path between a light source and an irradiated plane, through which a light beam having an energy density of 1 mJ/cm2/pulse or more passes. The diffractive optical element is formed by an oxide crystal material such as quartz crystal.
REFERENCES:
patent: 5699183 (1997-12-01), Hiraiwa et al.
patent: 5912725 (1999-06-01), Tanitsu
patent: 6303900 (2001-10-01), Tachikawa
patent: 6373554 (2002-04-01), Jinbo et al.
patent: 6377332 (2002-04-01), Sakuma et al.
patent: 6483639 (2002-11-01), Fujinoki et al.
patent: 6563567 (2003-05-01), Komatsuda et al.
patent: 6597498 (2003-07-01), Schuster
patent: 6680803 (2004-01-01), Schultz et al.
patent: 6741394 (2004-05-01), Tanitsu et al.
patent: 2002/0030890 (2002-03-01), Kato et al.
patent: 2003/0227684 (2003-12-01), Goto
patent: 100 62 579 (2001-06-01), None
patent: 100 29 938 (2001-07-01), None
patent: 854374 (1998-07-01), None
patent: A 2001-53002 (2001-02-01), None
patent: A 2001-176772 (2001-06-01), None
patent: A 2001-338861 (2001-12-01), None
patent: A 2002-040327 (2002-02-01), None
patent: A-2002-323658 (2002-11-01), None
patent: A 2002-323658 (2002-11-01), None
patent: WO 00/67303 (2000-11-01), None
Nguyen Henry Hung
Nikon Corporation
LandOfFree
Illumination optical device, photolithography machine, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Illumination optical device, photolithography machine, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination optical device, photolithography machine, and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3849219