Illumination optical apparatus with optical integrator

Details Illumination optical apparatus with optical integrator Illumination optical apparatus with optical integrator

1998-01-09

2000-04-18

Allen, Stephone

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250229, 250214PR, 355 53, G01J 132

Patent

active

060518421

ABSTRACT:
An illumination optical apparatus includes a light source emitting an illumination light beam, the illumination light beam being directed along a predetermined optical path, a variable optical filter disposed on the predetermined optical path of the illumination light beam for controlling the intensity of the illumination light beam, a transmissivity of the variable optical filter with respect to the illumination light beam being continuously variable, and an optical integrator receiving the illumination light beam that has passed through the variable optical filter to form a plurality of images of the light source.

REFERENCES:
patent: 4689078 (1987-08-01), Koike et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5581075 (1996-12-01), Naraki et al.
patent: 5661837 (1997-08-01), Yamamota et al..
patent: 5777724 (1998-07-01), Suzuki
patent: 5892573 (1999-04-01), Takahashi et al.

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