Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-02-08
2011-02-08
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S046000, C355S053000, C355S055000, C359S618000
Reexamination Certificate
active
07884921
ABSTRACT:
An illumination optical apparatus, used in a projection exposure apparatus for projecting and exposing a pattern arranged in a first plane to a second plane, for supplying the first surface with illumination light from a light source comprises an optical path combiner arranged in an optical path between the light source and the first surface, for combining a plurality of light beams different from each other from the light source such that the first and second light beams illuminate the first surface closely to each other. The optical path combiner includes a discrete point positioned on or near a third surface optically conjugate with the first surface. The plurality of light beams travel by way of a plurality of regions sectioned by the discrete point, respectively.
REFERENCES:
patent: 5724122 (1998-03-01), Oskotsky
patent: 6249382 (2001-06-01), Komatsuda
patent: 6383940 (2002-05-01), Yoshimura
patent: 6611316 (2003-08-01), Sewell
patent: 6628372 (2003-09-01), McCullough et al.
patent: 2005/0213070 (2005-09-01), Scharnweber
patent: 2005/0274898 (2005-12-01), Watanabe et al.
patent: 2006/0055834 (2006-03-01), Tanitsu et al.
patent: 2006/0158624 (2006-07-01), Toyoda
patent: 2006/0170901 (2006-08-01), Tanitsu et al.
patent: 2006/0286482 (2006-12-01), Sewell
patent: 2007/0013885 (2007-01-01), Loopstra et al.
patent: 2007/0013890 (2007-01-01), Loopstra et al.
patent: 2007/0013893 (2007-01-01), Loopstra
patent: 2007/0013894 (2007-01-01), Loopstra
patent: 2007/0014112 (2007-01-01), Ohya et al.
patent: 2007/0242249 (2007-10-01), Shibazaki et al.
patent: 2009/0040490 (2009-02-01), Shigematsu et al.
patent: 2009/0153819 (2009-06-01), Okita
patent: 2010/0123883 (2010-05-01), Ohmura
patent: A 11-111601 (1999-04-01), None
patent: A 2000-21742 (2000-01-01), None
patent: A 2000-21748 (2000-01-01), None
patent: A 2000-31028 (2000-01-01), None
patent: A 2001-297976 (2001-10-01), None
patent: WO 99/49504 (1999-09-01), None
patent: WO 2004/019128 (2004-03-01), None
Noboru Michio
Shiraishi Naomasa
Kreutzer Colin
Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
LandOfFree
Illumination optical apparatus, projection exposure... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Illumination optical apparatus, projection exposure..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination optical apparatus, projection exposure... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2646057