Illumination optical apparatus, exposure apparatus, and...

Details Illumination optical apparatus, exposure apparatus, and... Illumination optical apparatus, exposure apparatus, and...

2008-07-10

2011-12-20

Glick, Edward (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S074000, C355S067000

Reexamination Certificate

active

08081296

ABSTRACT:
An illumination optical apparatus of the present invention includes an illumination optical system having a plurality of reflection mirrors arranged to guide illumination light flux to an irradiated plane. A first partial field stop is arranged in an optical path of the illumination optical system to form a first profile line of an illumination region that is to be formed on the irradiated plane. A second partial field stop is arranged between the illumination optical system and the irradiated plane to form a second profile line of the illumination region. The illumination optical system includes a relay optical system for substantially optically conjugating the position of the first partial field stop and the position of the second partial field stop.

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