Illumination optical apparatus and scanning exposure apparatus u

Details Illumination optical apparatus and scanning exposure apparatus u Illumination optical apparatus and scanning exposure apparatus u

1996-04-09

1997-08-26

Ngo, John

Optical waveguides

Optical fiber bundle

385121, 385119, 385901, 385 33, G02B 606

Patent

active

056618379

ABSTRACT:
An illumination optical apparatus of this invention is small in size as a whole and capable of illuminating a plurality of illumination areas on a mask. The illumination optical apparatus illuminates a plurality of areas on a mask to be projected/exposed. This apparatus includes at least two light sources, a focusing optical system for focusing light beams from the respective light sources to form light source images, a light guide having incident ends equal in number to the light sources and exit ends equal in number to the illumination areas and serving to guide light beams from the respective light source images incident on the incident ends to the exit ends, and an illumination optical system for irradiating the light beams from the respective light source images emerging from the exit ends of the light guide onto the corresponding areas on the mask. The light guide is constituted by a plurality of optical fibers bundled together and divides light beams to make the amounts of light beams at the respective exit ends almost equal to each other.

REFERENCES:
patent: 4844568 (1989-07-01), Suzuki et al.
patent: 4932747 (1990-06-01), Russell et al.
patent: 5408572 (1995-04-01), Kriege
patent: 5430816 (1995-07-01), Furuya et al.
patent: 5491765 (1996-02-01), Matsumoto

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