Illumination optical apparatus and scanning exposure apparatus

Details Illumination optical apparatus and scanning exposure apparatus Illumination optical apparatus and scanning exposure apparatus

1994-12-28

1997-06-03

Pendegrass, Joan H.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 359618, H01L 21027

Patent

active

056360037

ABSTRACT:
An illumination optical apparatus for illuminating an object to be illuminated in an arcuate or rectangular shape. A first optical integrator forms a plurality of light source images in a substantially linear arrangement, based on a beam of parallel rays. Then a second optical integrator forms a plurality of light source images in a substantially square arrangement, based on the beam from the first optical integrator. A relay optical system is disposed between the first and second optical integrator, and makes a position of the light source images formed by the first optical cintegrator conjugate with a position of the light source images formed by the second optical integrator.

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patent: 5296892 (1994-03-01), Mori
patent: 5459547 (1995-10-01), Shiozawa

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