Illumination optical apparatus and projection exposure apparatus

Details Illumination optical apparatus and projection exposure apparatus Illumination optical apparatus and projection exposure apparatus

1995-11-15

1998-08-25

Moses, R. L.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, G03B 2742, G03B 2754

Patent

active

057988234

ABSTRACT:
The illumination optical apparatus of this invention is so arranged that light from a discharge lamp is collected by a rotationally symmetric collector mirror, the thus collected light is collimated into nearly parallel light by a collimator optical system, an optical integrator splits the parallel light into a plurality of light beams to form a plurality of secondary light sources, and thereafter the light from the secondary light sources is projected through a condenser optical system. A secondary light source distribution shaping portion is provided for shaping a light intensity distribution of the plural secondary light sources into a predetermined light intensity distribution, the two electrodes of the anode and cathode in the same discharge lamp are located in a predetermined relation, and an entrance surface of the optical integrator is located at a predetermined position with respect to a position where an image of a reflecting surface of the rotationally symmetric collector mirror is formed by the same collimator optical system.

REFERENCES:
patent: 4732842 (1988-03-01), Kira
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 5432588 (1995-07-01), Kamon
patent: 5636003 (1997-06-01), Tanitsu et al.
patent: 5661546 (1997-08-01), Taniguchi

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