Illumination optical apparatus and method and exposure apparatus

Details Illumination optical apparatus and method and exposure apparatus Illumination optical apparatus and method and exposure apparatus

1994-12-27

1998-02-10

Braun, Fred L.

Photocopying

Projection printing and copying cameras

Illumination systems or details

G03B 2772

Patent

active

057174830

ABSTRACT:
An illumination optical apparatus for setting the illuminance on an illuminated object as high as possible at or below the upper limit of illuminance. When the illumination state changing unit changes the illumination state of illumination light, for example, when the numerical aperture is decreased to lower the illuminance on the illuminated object, the power supplied to the light source is increased; inversely, when the numerical aperture is increased to enhance the illuminance on the illuminated object, the power supplied to the light source is decreased so that the illuminance is kept at or below the predetermined upper limit. This can maintain the illuminance on the illuminated object high and nearly constant even with a change of the illumination state.

REFERENCES:
patent: 5097291 (1992-03-01), Suzuki
patent: 5329336 (1994-07-01), Hirano et al.

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