Illumination method, illumination apparatus and projection expos

Details Illumination method, illumination apparatus and projection expos Illumination method, illumination apparatus and projection expos

1993-01-27

1994-04-12

Wintercorn, Richard A.

Photocopying

Including fiber optics

355 53, 355 77, G03B 2700

Patent

active

053029992

ABSTRACT:
A projection exposure apparatus comprises a light source for emitting a light beam for exposure; an illumination optical system comprising optical fiber bundle portion including a plurality of bundled optical fibers having an entrance plane to which a light beam exiting from the exposing light source is incident, and a little optical fiber bundle portion including a plurality of little optical fiber bundles respectively having an outgoing plane; and an projection exposure system for projecting a light beam passing through the illumination optical system and transmitting a mask or a reticle onto an object to be exposed as a pattern image of the mask or the reticle.

REFERENCES:
patent: 2982175 (1961-05-01), Eisler
patent: 3560085 (1971-02-01), Silverberg
patent: 4118123 (1978-10-01), Spence-Bate et al.
patent: 5075716 (1991-12-01), Jehan et al.
patent: 5091744 (1992-02-01), Omata
patent: 5144362 (1992-09-01), Kamon et al.
patent: 5150173 (1992-09-01), Isobe et al.
patent: 5159483 (1992-10-01), Watanabe et al.
patent: 5168021 (1992-12-01), Arai et al.

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