Illumination method and system having a first optical element at

Details Illumination method and system having a first optical element at Illumination method and system having a first optical element at

1996-03-22

1998-09-15

Braun, Fred L.

Photocopying

Projection printing and copying cameras

Step and repeat

356400, 356401, G03B 2742, G01B 1100

Patent

active

058087249

ABSTRACT:
An illumination system for illuminating an object, such as a system for detecting an alignment mark on a semiconductor wafer. The system includes a light source and an illumination optical system for directing light from the light source toward an object to be illuminated. A first optical element, which preferably is a hologram, is provided in a portion of the light path of the illumination optical system at a position optically conjugate with the object and has a function of amplitude-dividing the light and deflecting a divided light ray. A second optical element, which also preferably is a hologram, is provided in a portion of the light path that is closer to the object as compared to the first optical element and is disposed on a pupil plane of the illumination optical system. The second optical element also has a function of amplitude-dividing the light and deflecting a divided light ray.

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