Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-05-11
2009-06-16
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Reexamination Certificate
active
07548308
ABSTRACT:
An apparatus and associated method for reducing thermal damage on a specimen during an inspection which includes a radiation source for supplying a beam of radiation, and a means for adjusting a first energy level of the beam of radiation to a second energy level as the beam of radiation is variably positioned from a first location on the surface of the wafer to a second location on the surface of the wafer.
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Mcmillan Wayne
Wolters Christian
Chowdhury Tarifur
Hansen Jonathan M
KLA-Tencor Corporation
Luedeka Neely & Graham P.C.
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