Illumination device with allowable error amount of telecentricit

Details Illumination device with allowable error amount of telecentricit Illumination device with allowable error amount of telecentricit

1995-03-10

1997-01-14

Epps, Georgia Y.

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

355 67, 355 71, G03B 2710, G03B 2754, G03B 2772

Patent

active

055945872

ABSTRACT:
The illumination device of the present invention is directed to an illumination device comprising a light source system for generating illumination light, a collimate optical system for collimating the illumination light from the light source system into a substantially collimated light beam, an optical integrator for forming a plurality of light source images on the basis of the light beam from the collimate optical system, a variable aperture stop arranged at an exit surface of the optical integrator, and a condenser lens system for guiding the light beam from the optical integrator to a surface of an object to be illuminated, and making an incident surface of the optical integrator conjugate with the surface of the object to be illuminated.

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patent: 5420417 (1995-05-01), Shiraishi
patent: 5436692 (1995-07-01), Noguchi

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