Illumination device for projection exposure apparatus

Details Illumination device for projection exposure apparatus Illumination device for projection exposure apparatus

1993-03-31

1994-09-06

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, G03B 2754, G03B 2742

Patent

active

053452925

ABSTRACT:
An illumination device, includes a secondary light source forming system having a deflecting member with a conical light deflecting surface for transforming received light into substantially ring-like light, the secondary light source forming system forming a ring-like secondary light source by using the ring-like light; and an optical system for projecting divergent lights from portions of the secondary light source obliquely onto a surface to be illuminated so that the projected lights are superposed one upon another on the surface.

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