Illumination device and projection exposure apparatus using the

Details Illumination device and projection exposure apparatus using the Illumination device and projection exposure apparatus using the

1993-07-06

1994-11-08

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 70, 359619, 362268, G03B 2754

Patent

active

053631706

ABSTRACT:
An illumination device and a projection exposure apparatus using the same are disclosed, wherein an incoherency imparting optical system serves to amplitude-divide a coherent beam from a radiation source into plural beams and to impart an optical path length difference, not less than a coherent length of the coherent beam, to the divided beams, an optical integrator receives the divided beams to define a secondary light source, a condensing optical system directs a secondary beam from the secondary light source to a surface to be illuminated, an afocal system disposed on a path between the radiation source and the optical integrator has a variable angular magnification, and changing the angular magnification of the afocal system is contributable to changing the section of each of the beams impinging on the optical integrator to thereby adjust the intensity distribution of the secondary light source.

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