Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1993-06-25
1995-10-17
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 53, 362268, G03B 2754, G03B 2742
Patent
active
054595479
ABSTRACT:
An illumination device includes first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction intersecting the optical axis; a condensing optical system for collecting light passed through the first and second optical integrators, to form a secondary light source; and a mechanism for relatively shifting the second optical integrator relative to the first optical integrator, in a direction intersecting the optical axis.
REFERENCES:
patent: 4497013 (1985-01-01), Ohta
patent: 4497015 (1985-01-01), Konno et al.
patent: 4498742 (1985-02-01), Uehara
patent: 4974919 (1990-12-01), Muraki et al.
patent: 4988188 (1991-01-01), Ohta
patent: 5016149 (1991-05-01), Tanaka et al.
patent: 5048926 (1991-09-01), Tanimoto
patent: 5153773 (1992-10-01), Muraki et al.
Fukuda, et al., "Nikkei Microdevices", Jul. 1990, pp. 108 through 114.
Noguchi et al., "Subhalf Micron Lithography System with Phase-Shifting Effect", SPIE vol. 1674 Optical/Laser Microlithography V (1992), pp. 92-104.
Canon Kabushiki Kaisha
Wintercorn Richard A.
LandOfFree
Illumination device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Illumination device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-601488