Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-10-03
2006-10-03
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S071000
Reexamination Certificate
active
07116400
ABSTRACT:
The invention relates to an illumination assembly, including a beam expander being arranged for receiving from a radiation source a radiation beam directed in a first direction (z) and for expanding the beam with a first magnification factor in a second direction (x) and with a second magnification factor in a third direction (y). The first, second and third directions being substantially mutually orthogonal. The illumination assembly further includes a beam splitter that is arranged for splitting the radiation beam in two split radiation beams split in at least one of the second and third direction, the propagation direction of the split radiation beams being substantially in the first direction. The beam splitter is further arranged for delivering the split radiation beams to the beam expander, of which at least one of the magnification factors is adjustable.
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patent: 5982476 (1999-11-01), Uematsu
patent: 6219179 (2001-04-01), Nielsen et al.
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patent: 6597430 (2003-07-01), Nishi et al.
patent: 2002/0109827 (2002-08-01), Nishi
patent: 2004/0263817 (2004-12-01), Tanitsu et al.
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Rutledge D.
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