Illumination apparatus, projection exposure apparatus, and...

Details Illumination apparatus, projection exposure apparatus, and... Illumination apparatus, projection exposure apparatus, and...

2006-07-25

2006-07-25

Perkey, W. B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07081949

ABSTRACT:
An exposure apparatus having an exposure mode that transfers a pattern on a reticle onto an object, and a standby mode that waits for exposure includes an optical system for introducing the exposure light to the object in the exposure mode, and a mechanism for allowing the exposure light to enter the reticle and/or the optical system in the standby mode, and for preventing the exposure light from entering the object in the standby mode.

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