Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-08-23
2005-08-23
Tso, Laura K. (Department: 2875)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S063000
Reexamination Certificate
active
06934009
ABSTRACT:
There is provided an illumination apparatus including an optical integrator including multiple optical systems for receiving light from a light source, and for producing multiple beams for illuminating a plane of mask or reticle on which a pattern is draw, a position of an incidence plane of the optical integrator and a position of the plane to be illuminated being arranged optically conjugate with each other, and a device for forming an optical characteristic distribution of light at the incidence plane, the light entering at least part of the multiple optical systems, whereby different areas on the plane of plane to be illuminated can be illuminated under different illumination conditions.
REFERENCES:
patent: 5644390 (1997-07-01), Yasuzato
patent: 6049374 (2000-04-01), Komatsuda et al.
patent: 6259513 (2001-07-01), Gallatin et al.
patent: 6452662 (2002-09-01), Mulkens et al.
patent: 1-114035 (1989-05-01), None
patent: 9-160219 (1997-06-01), None
patent: 10-319321 (1998-12-01), None
patent: WO00/11706 (2000-03-01), None
Notice of Reasons for Rejection (English Translation of Japanese Office Action) mailed Sep. 14, 2004.
Canon Kabushiki Kaisha
Morgan & Finnegan , LLP
Tso Laura K.
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