Illumination apparatus, exposure apparatus using the same,...

Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C355S053000

Reexamination Certificate

active

07126757

ABSTRACT:
An illumination apparatus includes a first light integrator including a first optical element that has a section vertical to an optical axis and defined by a plurality of first sides, the first light integrator uniformly illuminating an illuminated plane, and a second light integrator for uniformly illuminating the first light integrator so that an outline of an illumination range in which light incident upon the first light integrator illuminates the light incidence plane of the first light integrator includes a plurality of second sides each of which is not parallel with any one of the first sides.

REFERENCES:
patent: 4841341 (1989-06-01), Ogawa et al.
patent: 5253110 (1993-10-01), Ichihara et al.
patent: 5459547 (1995-10-01), Shiozawa
patent: 5636003 (1997-06-01), Tanitsu et al.
patent: 5636005 (1997-06-01), Yasuzato
patent: 5684567 (1997-11-01), Shiozawa
patent: 5790239 (1998-08-01), Komatsuda et al.
patent: 6049374 (2000-04-01), Komatsuda et al.
patent: 2001/0015797 (2001-08-01), Suzuki et al.
patent: 0 867 772 (1998-09-01), None
patent: 1 014 196 (2000-06-01), None
patent: 1 069 600 (2001-01-01), None
patent: 1 114 802 (2001-07-01), None
patent: 05-259029 (1993-08-01), None
patent: 6-13289 (1994-01-01), None
patent: 8-8168 (1996-01-01), None
patent: 8-286382 (1996-11-01), None
patent: 10-92729 (1998-04-01), None
patent: 11-150051 (1999-02-01), None
patent: 2001-176766 (2001-06-01), None
Translation of Korean Patent Office Communication for counterpart Application No. 10-2002-0055931.
People's Republic of China Patent Office Communication for counterpart Application No. 02143517.4.
Translation of People's Republic of China Patent Office Communication for counterpart Application No. 02143517.4 (Item BB).
English Abstract of Japanese Publication 11-176742 (Item B).
English Translation of Japanese Publication 11-176742 (Item B).
Office Action dated Jan. 24, 2006, corresponding to Japanese Patent Application No. 2004-146995.
English translation of Office Action dated Jan. 24, 2006, corresponding to Japanese Patent Application No. 2004-146995.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Illumination apparatus, exposure apparatus using the same,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illumination apparatus, exposure apparatus using the same,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination apparatus, exposure apparatus using the same,... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3715851

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.