Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-10-31
2006-10-31
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S067000
Reexamination Certificate
active
07130025
ABSTRACT:
An illumination apparatus for illuminating a mask having a pattern, using light from a light source, includes a generating section for generating an effective light source distribution for a modified illumination to the mask, a polarization setting section for setting a predetermined polarization state in plural areas in the effective light source distribution, and an adjusting section for commonly controlling a polarization state of each area.
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Canon Kabushiki Kaisha
Morgan & Finnegan L.L.P.
Nguyen Henry Hung
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