Illumination apparatus, exposure apparatus and device...

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

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Details

C355S067000

Reexamination Certificate

active

07130025

ABSTRACT:
An illumination apparatus for illuminating a mask having a pattern, using light from a light source, includes a generating section for generating an effective light source distribution for a modified illumination to the mask, a polarization setting section for setting a predetermined polarization state in plural areas in the effective light source distribution, and an adjusting section for commonly controlling a polarization state of each area.

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patent: PCT/JP 2004/013592 (2004-11-01), None

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