Illumination apparatus and projection exposure apparatus using t

Details Illumination apparatus and projection exposure apparatus using t Illumination apparatus and projection exposure apparatus using t

1996-03-29

1998-03-24

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250548, G01B 1100

Patent

active

057315779

ABSTRACT:
An illumination apparatus has at least one of a luminous flux angle adjustment means and a luminous flux translation means. Due to these luminous flux angle adjustment means and luminous flux translation means, the inclination and positional deviation of a luminous flux can be corrected with a high accuracy without finely adjusting the position of the light source. Accordingly, when this illumination apparatus is incorporated in a projection exposure apparatus, change in exposure light quantity and fluctuation in illuminance can be suppressed so as to stably effect exposure.

REFERENCES:
patent: 4619508 (1986-10-01), Shibuya et al.
patent: 4742219 (1988-05-01), Ando
patent: 4851978 (1989-07-01), Ichihara
patent: 4918583 (1990-04-01), Kudo et al.
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 5138176 (1992-08-01), Nishi
patent: 5153419 (1992-10-01), Takahashi
patent: 5184196 (1993-02-01), Nakagawa et al.
patent: 5237367 (1993-08-01), Kudo
patent: 5307207 (1994-04-01), Ichihara

Affiliated with

Also associated with

Rating

Illumination apparatus and projection exposure apparatus using t does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illumination apparatus and projection exposure apparatus using t, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination apparatus and projection exposure apparatus using t will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2290693