Illumination apparatus and exposure apparatus using it

Details Illumination apparatus and exposure apparatus using it Illumination apparatus and exposure apparatus using it

1994-06-14

1997-03-25

Epps, Georgia Y.

Optical: systems and elements

Single channel simultaneously to or from plural channels

359798, 362268, G02B 2710, G02B 2702, F21V 2900

Patent

active

056150474

ABSTRACT:
An illumination apparatus for uniformly illuminating an illuminated object surface. The apparatus comprises light source means for supplying an illumination light beam having parallel rays, an optical integrator for forming a plurality of beams from the illumination light beam from said light source means, a condenser optical system for converging the plurality of beams from said optical integrator to illuminate the illuminated object surface in a superimposed manner, and an optical member having a light quantity attenuator for transmitting said illumination light beam so as to attenuate a light quantity of said illumination light beam by a predetermined amount, said optical member being located at or in the vicinity of a position conjugate with said illuminated object surface.

REFERENCES:
patent: 4619508 (1986-10-01), Shibuya
patent: 4851978 (1989-07-01), Ichihara
patent: 5004348 (1991-04-01), Magome
patent: 5237367 (1993-08-01), Kudo
patent: 5251067 (1993-10-01), Kamon
patent: 5305054 (1994-04-01), Suzuki
patent: 5309198 (1994-05-01), Nakagawa
patent: 5335044 (1994-08-01), Shiraishi
patent: 5379090 (1995-01-01), Shiraishi
patent: 5420417 (1995-05-01), Shiraishi
patent: 5424803 (1995-06-01), Noguchi
patent: 5459547 (1995-10-01), Shiozawa

Affiliated with

Also associated with

Rating

Illumination apparatus and exposure apparatus using it does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illumination apparatus and exposure apparatus using it, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination apparatus and exposure apparatus using it will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2208682