Illumination apparatus and exposure apparatus

Details Illumination apparatus and exposure apparatus Illumination apparatus and exposure apparatus

2007-03-13

2007-03-13

Perkey, W. B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

11062024

ABSTRACT:
An illumination apparatus for illuminating a target surface using light includes a light source that emits the light, a reflection integrator that forms plural secondary light sources using the light from the light source, and an optical unit that differentiates Helmholtz-Lagrange invariants in two orthogonal directions with respect to the light incident upon the reflection integrator.

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