Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1998-03-13
2000-04-11
Blankenship, Howard B.
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 53, G03B 2754, G03B 2742
Patent
active
060493747
ABSTRACT:
An illumination apparatus is provided capable of obtaining identical line widths at all positions in an image surface. A projection exposure apparatus using this illumination apparatus is also provided as well as a method of manufacturing the projection exposure apparatus and a method of manufacturing a device using this apparatus. The illumination apparatus includes a light source system for supplying a light beam, an optical integrator for forming a plurality of light sources based on a light beam from the light source and a condenser optical system for converging beams from the plurality of light sources for illuminating an illuminated surface. The apparatus also has a filter placed in a location that is in an optically conjugate relationship to the illuminated surface. The filter has at least a first area corresponding to a first portion of the plurality of light sources, and a second area corresponding to a second portion of the plurality of light sources other than the first portion. The filter has at least one first filter element having a first transmissivity distribution provided over the entirety of the first area of the filter. The filter also has at least one second filter element having a second transmissivity distribution that is the inverse of the first transmissivity distribution provided over the entirety of the second area of the filter.
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Komatsuda Hideki
Ushida Kazuo
Blankenship Howard B.
Lieberstein Eugene
Meller Michael N.
Nguyen Hung Henry
Nikon Corporation
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