Illumination apparatus

Details Illumination apparatus Illumination apparatus

1986-09-30

1987-07-28

Hix, L. T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 71, 362268, 350167, 350433, 350523, G03B 2754

Patent

active

046828850

ABSTRACT:
An illumination apparatus for illuminating, with a light beam of arcuate cross-section, a mask having an integrated-circuit pattern to transfer the integrated-circuit pattern onto a semiconductor wafer includes an illumination optical system having a light source, a plurality of cylindircal lenses and a collimator lens to illuminate, in the Kohler illumination manner, a rectangular region on a predetermined plane, a restricting member disposed in the predetermined plane to restrict the light beam incident on the predetermined plane so that a light beam of arcuate cross-section emerges from the predetermined plane, and an optical member for forming an image of the restricting member on the mask. With this arrangement, the pattern of the mask is transferred onto the wafer without any distortion.

REFERENCES:
patent: 3724924 (1973-04-01), Lenfant et al.
patent: 4294538 (1981-10-01), Ban
patent: 4497015 (1985-01-01), Konno et al.
patent: 4498742 (1985-02-01), Uehara

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