X-ray or gamma ray systems or devices – Source
Patent
1998-07-17
2000-05-30
Porta, David P.
X-ray or gamma ray systems or devices
Source
378 34, 378120, G21G 400
Patent
active
06069937&
ABSTRACT:
An illumination apparatus for illuminating an object with X-rays. The illumination apparatus has a high illumination efficiency, and the numerical aperture of the X-rays is nearly uniform over an arcuate area, and is independent of the illumination position. The apparatus comprises an excitation energy light generation unit for generating excitation energy light rays and a target member having a curved surface and plurality of X-ray sources formed thereon that emit X-rays when irradiated by the light rays. The apparatus further comprises an illumination optical system that images X-rays from said plurality of X-ray sources onto the object to be illuminated. The target member curved surface may be cylindrical. The target member may also be tape-shaped and provided along the curved surface. Further, the target member may be metallic, particulate, liquid or gas.
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patent: 5668848 (1997-09-01), Riegar
patent: 5677939 (1997-10-01), Oshino
Kondo Hiroyuki
Oshino Tetsuya
Ho Allen C.
Nikon Corporation
Porta David P.
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