Illumination aperture of low intensity loss

Details Illumination aperture of low intensity loss Illumination aperture of low intensity loss

1995-10-12

1998-02-03

Moses, R. L.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 71, 362296, F21V 700, G03B 2742, G03B 2754

Patent

active

057150400

ABSTRACT:
In a photolithography system, an illumination assembly to provide intensified uniform illumination includes an illumination source reflector and a plate having an aperture opening therethrough and a mirrored surface thereon, the mirrored surface of the plate confronting the illumination source reflector. The illumination assembly further includes an illumination source for generating illumination disposed between the illumination source reflector and the plate.

REFERENCES:
patent: 3848997 (1974-11-01), Muehloegger
patent: 4095881 (1978-06-01), Maddox
patent: 4143966 (1979-03-01), Gandini
patent: 4295186 (1981-10-01), Sugiura et al.
patent: 4519020 (1985-05-01), Little
patent: 4739456 (1988-04-01), Little
patent: 4964705 (1990-10-01), Markle
patent: 5040882 (1991-08-01), Markle
patent: 5124891 (1992-06-01), Blusseau
patent: 5144362 (1992-09-01), Kamon et al.
patent: 5235499 (1993-08-01), Bertenshaw
patent: 5309340 (1994-05-01), Shigeta et al.
patent: 5355194 (1994-10-01), Zumoto et al.
patent: 5357312 (1994-10-01), Tounai
patent: 5369557 (1994-11-01), Ronney
patent: 5396311 (1995-03-01), Fukushima et al.
patent: 5438495 (1995-08-01), Ahlen et al.
patent: 5467166 (1995-11-01), Shiraishi
patent: 5477653 (1995-12-01), Altmayer
patent: 5491525 (1996-02-01), Yamasaki et al
patent: 5535111 (1996-07-01), Wedell
patent: 5552856 (1996-09-01), Shiraishi et al.
patent: 5565958 (1996-10-01), Kaplan

Affiliated with

Also associated with

Rating

Illumination aperture of low intensity loss does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illumination aperture of low intensity loss, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination aperture of low intensity loss will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-667365