Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1993-09-28
1994-10-18
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 53, 355 71, G03B 2754, G03B 2742
Patent
active
053573129
ABSTRACT:
The invention relates to an illuminating system in an exposure apparatus used for the fabrication of semiconductor devices to transfer a pattern on a reticle to a substrate having a photosensitive surface. As is usual, the illuminating system has reflecting and collimating elements to form light rays emitted from a light source into a light beam circular in cross-sectional shape, an optical integrater to uniformalize the light beam and an aperture diaphragm to desirably shape the uniformalized light beam. A reducing or magnifying lens, which is interchangeable with another reducing or magnifying lens different in reducing or magnifying power, is added in oreder to vary the diameter of the light beam nearly in conformance with the aperture diameter before the beam arrives at the aperture diaphragm to thereby reduce a loss of illuminating light by blockage by the aperture diaphragm. According to the need, the cross-sectional shape of the light beam can be rendered annular by incorporating a combination of two oppositely aligned optical elements one of which has a conically convex surface on the exit side and the other a conically concave surface opposite to the conically convex surface.
REFERENCES:
patent: 5237367 (1993-08-01), Kudo
patent: 5245384 (1993-09-01), Mori
patent: 5287142 (1994-02-01), Kamon
patent: 5309198 (1994-05-01), Nakagawa
NEC Corporation
Wintercorn Richard A.
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