Illuminating optical system

Details Illuminating optical system Illuminating optical system

1987-06-02

1988-12-06

Corbin, John K.

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355 46, 355 67, 355 78, G02B 2700, G02B 2744

Patent

active

047892226

ABSTRACT:
This specification discloses an illuminating optical system in which the optical position of a multi-beam generating optical element along the direction of the optical axis is variable, whereby a desired printing wavelength selected from a wide wavelength range from the UV area to the Deep UV area can be used in the same illuminating optical system and illumination irregularity can be kept very slight.

REFERENCES:
patent: 2380210 (1945-07-01), Bennett
patent: 3941475 (1976-03-01), Sheets
patent: 3988066 (1976-10-01), Suzuki et al.
patent: 4447111 (1984-05-01), Leib
patent: 4497013 (1985-01-01), Ohta
Hecht et al., Optics, 1974, pp. 186-188.

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